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发明名称
FORMING METHOD OF GATE ELECTRODE
摘要
申请公布号
JPH05283435(A)
申请公布日期
1993.10.29
申请号
JP19920049311
申请日期
1992.03.06
申请人
发明人
分类号
H01L29/812;H01L21/338;H01L29/778;(IPC1-7):H01L21/338
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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