| 摘要 |
PURPOSE:To control a trap in temperature without raising a cooling source in temperature by a method wherein a vacuum space is interposed between the trap where laser gas is introduced and the cooling source, and a means is provided to control the pressure of the vacuum space. CONSTITUTION:A laser gas purifying device 1 which removes impurity gas contained in laser gas of a rare gas halide excimer laser device 2 is equipped with a trap 3 where laser gas is introduced and a cooling source 4 which cools down laser gas. A vacuum control means is composed of a vacuum space 10 interposed between the trap 3 and the cooling source 4, a three-way valve 12, a vacuum pump 13, a dry nitrogen source 14, flow rate control valves 15 and 16, a controller 17, and a temperature sensor 18 and controls the pressure of the vacuum space 10 in accordance with a stored control program. By this setup, the trap 3 is controlled in temperature without a rise in temperature of the cooling source 4, and the consumption of coolant can be reduced. Further, regeneration time is shortened and labor is saved. |
