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发明名称
摘要
申请公布号
JPH0543107(Y2)
申请公布日期
1993.10.29
申请号
JP19880089526U
申请日期
1988.07.07
申请人
发明人
分类号
C30B15/02;H01L21/208;(IPC1-7):C30B15/02
主分类号
C30B15/02
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