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发明名称
DIFFUSION METHOD OF HIGH CONCENTRATION ARSENIC
摘要
申请公布号
JPH05283353(A)
申请公布日期
1993.10.29
申请号
JP19920080642
申请日期
1992.04.02
申请人
发明人
分类号
H01L21/225;H01L21/324;(IPC1-7):H01L21/225
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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