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发明名称
RECOVERY OF CONTAMINANT METAL ELEMENT ON SILICON WAFER SURFACE
摘要
申请公布号
JPH05283381(A)
申请公布日期
1993.10.29
申请号
JP19920080776
申请日期
1992.04.02
申请人
发明人
分类号
H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
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代理人
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