APPARATUS AND METHOD FOR INSPECTING MICRO-CRACK,申请号JP19920079582-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR INSPECTING MICRO-CRACK
摘要
申请公布号	JPH05281149(A)	申请公布日期	1993.10.29
申请号	JP19920079582	申请日期	1992.04.01
申请人		发明人
分类号	G01B11/30;G01N21/88;G01N21/956;H01L21/66;(IPC1-7):G01N21/88	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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