发明名称 PROCESS FOR LIFT-OFF OF THIN FILM MATERIALS FROM A GROWTH SUBSTRATE
摘要 <p>Various novel lift-off and bonding processes (60, 80, 100) permit lift-off of thin film materials and devices (68), comprising InxGa1-xAsyP1-y where 0&lt;x&lt;1 and 0&lt;y&lt;1, from a growth substrate (62) and then subsequent alignable bonding of the same to a host substrate (84). As a result, high quality communication devices can be fabricated for implementing a three dimensional electromagnetic communication network within a three dimensional integrated circuit cube (10), an array (90) of optical detectors (98) for processing images at very high speed, and a micromechanical device (110) having a platform (114) for steering or sensing electromagnetic radiation or light.</p>
申请公布号 WO1993021663(A1) 申请公布日期 1993.10.28
申请号 US1993003244 申请日期 1993.04.07
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