EINRICHTUNG ZUR AUTOMATISCHEN JUSTIERUNG VON HALBLEITERSCHEIBEN,申请号DD19860291990-传众专利搜索

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发明名称	EINRICHTUNG ZUR AUTOMATISCHEN JUSTIERUNG VON HALBLEITERSCHEIBEN
摘要
申请公布号	DD250792(B5)	申请公布日期	1993.10.28
申请号	DD19860291990	申请日期	1986.07.01
申请人	JENOPTIK CARL ZEISS JENA GMBH,DE	发明人	GOMMEL,KARL-WERNER,DR.-ING.,DE;HILTAWSKI,KNUT,DIPL.-ING.,DE;MICHL,UWE,DE;MUELLER,DIETRICH,DIPL.-ING.,DE;NESTLER,KLAUS,DIPL.-ING.,DE;OSTERLAND,GUENTER,DE;SCHULTZ,KLAUS,DE
分类号	G03F9/00;H01L21/68;(IPC1-7):G03F9/00	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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