Hochempfindliches Positionsmess-Verfahren.,申请号DE1990601386T-传众专利搜索

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发明名称	Hochempfindliches Positionsmess-Verfahren.
摘要
申请公布号	DE69001386(T2)	申请公布日期	1993.10.28
申请号	DE1990601386T	申请日期	1990.05.04
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	MAMIN, HARRY JONATHON, PALO ALTO, CA 94303, US;RUGAR, DANIEL, PALO ALTO, CA 94301, US
分类号	G01B9/02;G01D5/26;G01Q10/06;G01Q20/02;G01Q60/24;G02B6/00;(IPC1-7):G01D5/26;H01J37/26	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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