| 摘要 |
<p>PURPOSE:To prevent the reduction of purity due to a residual gas by connecting a pipeline for introducing self-gas to the part near to a feed source side of regeneration gas in comparison with a valve for introducing selectively regeneration gas into a purification line. CONSTITUTION:Gaseous raw material is introduced into a reaction cylinder 5 via a preheater 4 to convert hydrocarbon and O2 into CO2 and water and introduced into a purification line B. Then after removing O2 in a deoxidization cylinder 30, it is cooled by a chiller 32 and both water and CO2 are removed in an adsorption cylinder 34 and purified gas is taken out through a pipeline D of an outlet side. A regeneration process is advanced in a purification line C and firstly regeneration gas (H2) is flowed in the adverse direction through the purification line C and both water content and CO2 of an adsorption cylinder 35 are deadsorbed and O2 of a deoxidization cylinder 31 is discharged as water. Thereafter a valve 52 is closed and a valve 60 is opened and gaseous N2 purified in the purification line B is fed to a feed line E of regeneration gas to perform purge of gaseous H2.</p> |
