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发明名称
Verfahren zum Evakuieren einer Vakuumkammer und einer Hochvakuumkammer sowie Hochvakuumanlage zu seiner Durchführung
摘要
申请公布号
DE4213763(A1)
申请公布日期
1993.10.28
申请号
DE19924213763
申请日期
1992.04.27
申请人
LEYBOLD AG, 63450 HANAU, DE
发明人
GEBELE, THOMAS, 6463 FREIGERICHT, DE;BUSCHBECK, WOLFGANG, 6450 HANAU, DE
分类号
B01J3/00;F04B37/14;(IPC1-7):B01J3/04;G01L21/00
主分类号
B01J3/00
代理机构
代理人
主权项
地址
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