发明名称 |
SEMI-CONDUCTOR DEVICE, METHOD OF FABRICATION AND DEVICE USED FOR THE FABRICATION |
摘要 |
<p>A semiconductor component and a method for the fabrication thereof are proposed, in which between an active semiconductor layer (21, 22) and a substrate (18) a nucleation layer (20) is disposed. The face of the substrate (18) facing the nucleation layer (20) is either sealed or has a layer (19) sealing the face. <IMAGE></p> |
申请公布号 |
EP0536682(A3) |
申请公布日期 |
1993.10.27 |
申请号 |
EP19920117007 |
申请日期 |
1992.10.06 |
申请人 |
NUKEM GMBH |
发明人 |
VON CAMPE, HILMAR, DR.;EBINGER, HORST;NIKL, DIETER, DR.;WARZAWA, WOLFGANG |
分类号 |
H01L21/20;H01L21/36;H01L31/0236;H01L31/0392;H01L31/056;H01L31/18;(IPC1-7):H01L31/039;H01L31/068;H01L31/023 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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