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发明名称
PROCESS ENHANCEMENT USING MOLYBDENUM PLUGS IN FABRICATING INTEGRATED CIRCUITS
摘要
申请公布号
EP0506710(A4)
申请公布日期
1993.10.27
申请号
EP19910900609
申请日期
1990.10.11
申请人
MICRO POWER SYSTEM, INC.
发明人
RAO, RAMAN, K.
分类号
H01L21/28;H01L21/02;H01L21/285;H01L21/768;H01L21/822;H01L23/522;H01L27/04;(IPC1-7):H01L21/70
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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