发明名称 Fabrication of polycrystalline silicon resistors.
摘要 <p>A method of fabricating polycrystalline silicon resistors having nearly zero or positive temperature coefficient includes the steps of depositing a layer of polycrystalline silicon, implanting the layer with silicon to make the layer substantially amorphous, introducing an impurity to dope the layer, and annealing the layer.</p>
申请公布号 EP0281276(B1) 申请公布日期 1993.10.27
申请号 EP19880301351 申请日期 1988.02.18
申请人 FAIRCHILD SEMICONDUCTOR CORPORATION 发明人 KAPOOR, ASHOK K.
分类号 H01L27/04;H01L21/02;H01L21/265;H01L21/3215;H01L21/822;(IPC1-7):H01L21/31 主分类号 H01L27/04
代理机构 代理人
主权项
地址