摘要 |
In an aperture electrode and a method for manufacturing the same, two metal layers are formed on both surfaces of a thin ceramic insulating substrate by a thin film forming process such as sputtering, and then plural control electrodes are formed on one surface of the substrate by patterning the metal layer on the surface with photoetching, thereby forming a basic body of the aperture electrode. Thereafter, an aperture for passing toners therethrough is formed substantially at the center of each control electrode by drilling the basic body or irradiating laser beam of an excimer laser source to the basic body.
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