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发明名称
FORMATION OF ALUMINUM SERIES MATERIAL FILM AND DEVICE THEREFOR
摘要
申请公布号
JPH05279853(A)
申请公布日期
1993.10.26
申请号
JP19920103741
申请日期
1992.03.30
申请人
发明人
分类号
C23C14/14;C23C14/58;H01L21/3205;H01L23/52;(IPC1-7):C23C14/58;H01L21/320
主分类号
C23C14/14
代理机构
代理人
主权项
地址
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