| 摘要 |
PURPOSE:To provide a driving device in which the deviation of a nut in the radial direction is absorbed in a simple structure so as to accomplish a highly accurate drive and positioning of a body to drive, and an XY driving device provided with such a driving device. CONSTITUTION:A nut 112 is held by an intermediate member 11 which has flexible parts 5 to 8 flexible in the radial direction square to the axial center of a feed screw 111, and the deviation part of the nut 112 is absorbed by the deflections of the flexible parts. |
