| 摘要 |
An installation for making a clean-room comprises at least one incoming-air part connected to a pressurized plenum 16 arranged in the upper part of the room, and at least one outgoing-air part connected to a low-pressure plenum 24 arranged in the lower part of the room. The incoming-air and outgoing-air parts comprise side delimitations 10, 22 adjoining said plenums, and a filter 14 is arranged in the incoming-air part through which the incoming air is made to pass. The invention can be used for production lines for high- technology products, such as for example chip manufacture within the microelectronics industry. <IMAGE> |
