发明名称 MANUFACTURE OF ROM SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To lessen the process of manufacturing a ROM semiconductor memory device in turnaround time by a method wherein a ROM code write process is postponed as late as possible. CONSTITUTION:The surface of a gate electrode 24 of a matrix transistor is selectively exposed making use of a contact process, phosphorus ions are so implanted as to pass through the gate electrode 24, an N<->-type channel diffusion layer 29 is formed on the channel region of the matrix transistor, and then a ROM code is written. Thereafter, the gate electrode 24 is sealed up with an aluminum cap 31.
申请公布号 JPH05275654(A) 申请公布日期 1993.10.22
申请号 JP19920068351 申请日期 1992.03.26
申请人 发明人
分类号 H01L27/112;H01L21/8246 主分类号 H01L27/112
代理机构 代理人
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