| 摘要 |
PURPOSE:To economically form the ridge-type three-dimensional waveguide of a low propagation loss by utilizing a large increase in the etching rate ratio of the positive polarization surface and negative polarization surface of a monopolarized dielectric substance. CONSTITUTION:A pattern is formed by using a conductive thin film 3 on a two-dimensional waveguide 2 consisting of the monopolarized dielectric material and is subjected to a heat treatment to invert a part of the polarization direction of the monopolarized dielectric substance. The ridge shape is formed by chemical wet etching. The pattern is otherwise formed by using the conductive thin film on the monopolarized dielectric material and is subjected to the heat treatment to invert a part of the polarization direction of the monopolarized dielectric substance. The ridge shape is then formed by the chemical wet etching to form the optical waveguide in at least a part on the dielectric material. No influence is exerted on the crystal structure according to the polarization inversion method, like Ti diffusion and proton exchange, in such a case, and therefore, the waveguide having excellent optical characteristics are produced. |
