MANUFACTURE OF AMORPHOUS SILICON FILM, AND MANUFACTURE OF AMORPHOUS SILICON NITRIDE FILM, AND MANUFACTURE OF CRYSTALLITE SILICON FILM, AND NONSINGLE CRYSTAL SEMICONDUCTOR DEVICE,申请号JP19920100219-传众专利搜索

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发明名称	MANUFACTURE OF AMORPHOUS SILICON FILM, AND MANUFACTURE OF AMORPHOUS SILICON NITRIDE FILM, AND MANUFACTURE OF CRYSTALLITE SILICON FILM, AND NONSINGLE CRYSTAL SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH05275346(A)	申请公布日期	1993.10.22
申请号	JP19920100219	申请日期	1992.03.27
申请人		发明人
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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