| 摘要 |
PURPOSE:To obtain a method suitable for optical paths for IR rays. CONSTITUTION:In the process for production of thin films 21, 22 of diamond-like carbon=DLC transparent to IR rays by using a parallel flat plate type high-frequency plasma CVD device; patterns varying in hydrogen concn., refractive index and hardness are formed without masking by a stage for providing a DC bias potential in such a manner that a substrate material is held negative and changing the hydrogen concn., refractive index and hardness of the films 21, 22 by adjusting the potential and by forming the patterns of the optical paths by dielectric substances of different dielectric constants on the surfaces of electrodes, thereby providing differences in local plasma density between the electrodes. |
