| 摘要 |
PURPOSE:To obtain a method, which measures the slight difference between a shape reference body and a body, whose shape is to be inspected, at a high speed. CONSTITUTION:As an object body 4, a shape reference body is positioned and provided with positioning guides 2 and 3 on a supporting stage 1. The bright/ dark pattern, which is picked up with a video camera 6, is stored in an image memory 10. Amid this operation, a switch 9 is connected to a terminal (a). Then, a body, whose shape is to be inspected, is positioned and provided on the supporting stage 1 by the same way. The bright/dark pattern is picked up with the video camera. At this time, the switch 9 is connected to a terminal (b). The amount of deviation between the image from the video camera 6 and the image, which is read out of the image memory 10, is measured with a deviation-amount measuring circuit 7. The pass or the fail is judged with a judging circuit 8. |
