Verfahren zur Herstellung eines Mikrosystems und daraus Bildung eines Mikrosystemlasers

摘要

The invention concerns a method of manufacturing a microsystem and of producing from it a microsystem laser designed preferably as a vertical structural element formed by contacting wafers carrying different functional system elements so that (a) this system includes heterogeneous functions such as actuators, optics, sensors, cooling system, micro-mechanics and electronics and (b) the wafers carrying these functions permit relatively homogeneous processing of the extremely similar functions integrated on each wafer so that the complexity of the system is only produced by the vertical disposition of these functions.