CVD (Chemical Vapour Deposition)-Vorrichtung,申请号DE19893935863-传众专利搜索

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发明名称	CVD (Chemical Vapour Deposition)-Vorrichtung
摘要
申请公布号	DE3935863(C2)	申请公布日期	1993.10.21
申请号	DE19893935863	申请日期	1989.10.27
申请人	PHILIPS PATENTVERWALTUNG GMBH, 20097 HAMBURG, DE	发明人	BRINGMANN, UDO, 2083 HALSTENBEK, DE;SIX, ROLF, 2359 HENNSTEDT-ULZBURG, DE;KLAGES, CLAUS-PETER, DR., 2000 HAMBURG, DE;SCHAEFER, LOTHAR, DR., 2000 HAMBURG, DE
分类号	C04B35/56;H05B3/12;(IPC1-7):H05B3/12	主分类号	C04B35/56
代理机构		代理人
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