BESCHLEUNIGUNGSMESSER MIT KOPLANAREN SYMMETRISCHEN KRAFTÜBERTRAGERN.
摘要
A push-pull accelerometer in which both force transducers lie in a common plane. Thus, when implemented in silicon micromachined device, both transducers can be fabricated from a single crystal layer, thereby producing transducers with closely matched common mode responses.
申请公布号
DE69003339(D1)
申请公布日期
1993.10.21
申请号
DE1990603339
申请日期
1990.01.08
申请人
SUNDSTRAND CORP., ROCKFORD, ILL., US
发明人
NOVAK, MITCHELL, KIRKLAND, WA 98033, US;NORLING, BRIAN, L., MILL CREEK, WA 98012, US;WOODRUFF, JAMES, R., REDMOND, WA 98052, US