申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
ITOH, KUNIO SHIN-ETSU CHEMICAL CO. LTD., ISOBE 2-CHOME ANNAKA-SHI GUNMAKEN, JP;SHIOBARA, TOSHIO SHIN-ETSU CHEMICAL CO. LTD., ISOBE 2-CHOME ANNAKA-SHI GUNMAKEN, JP;FUTATSUMORI, KOJI SHIN-ETSU CHEMICAL CO. LTD., ISOBE 2-CHOME ANNAKA-SHI GUNMAKEN, JP;TOMIYOSHI, KAZUTOSHI SHIN-ETSU CHEMICAL CO. LTD., ISOBE 2-CHOME ANNAKA-SHI GUNMAKEN, JP;SHIMIZU, HISASHI SHIN-ETSU CHEMICAL CO. LTD., ISOBE 2-CHOME ANNAKA-SHI GUNMAKEN, JP |