Mehrschicht-Keramik ausgehend von Silikatestern.

摘要

Disclosed are materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester which is applied to a substrate and heated to form a ceramic. One or more ceramic coatings containing silicon+carbon, silicon+nitrogen, or silicon+carbon+nitrogen can be applied over the ceramic SiO2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.