| 摘要 |
<p>A laser wherein the lives of optical parts are long by preventing dust from being produced by a heat exchanger, the size of the heat exchanger is small, and further, the output power is high. A plate type heat exchanger (41) is used as the cooler of a laser device (1). Since the dust produced by the plate type heat exchanger (41) can be removed in the manufacturing process, dust from the heat exchanger does not enter a laser (2), and the lives of optical parts (25, 26) can be greatly prolonged. Also, since both the size and weight of the plate type heat exchanger (41) can be reduced, a laser gas circulatory system (3) can be simplified. Further, the plate type heat exchanger (41) can be disposed in proximity to an outlet port (20) of the laser gas because the effect of the vibration added to a discharge tube (21) is reduced. Thereby, the flow rate of the laser gas can be increased by virtue of the reduction of its frictional resistance, and the laser power can be augmented. <IMAGE></p> |
