| 摘要 |
<p>PURPOSE:To shorten the process of reticle manufacture and find misinput of arrangement information in its early stage by standardizing data in the reticle manufacture process. CONSTITUTION:A data converting device 2 generates manufacture data plus arrangement information 10 with design data 1 and arrangement information 4 and inputs them to a verifying device 11 to perform verification 12 in the form of a reticle image; when the data are acceptable, a reticle manufacture device 6 is put in operation to manufacture the reticle 7. For a chip pattern, the manufacture data name and arrangement coordinates of an in-chip element A are inputted as arrangement information data at the same time successively to the name and size of the reticle and input data on in-chip elements B, C... are generated similarly. Then data are inputted in the order of pattern data A on the in-chip element A, pattern data B, pattern data C... successively to the arrangement information data. Those manufacture data plus arrangement data 10 are verified, the reticle 7 based upon the data is manufactured when the data are acceptable, and the reticle is used to perform a wafer process 9.</p> |
