LAPPING METHOD FOR LINBO3 SINGLE CRYSTAL WAFER,申请号JP19920062230-传众专利搜索

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发明名称	LAPPING METHOD FOR LINBO3 SINGLE CRYSTAL WAFER
摘要
申请公布号	JPH05267258(A)	申请公布日期	1993.10.15
申请号	JP19920062230	申请日期	1992.03.18
申请人		发明人
分类号	C30B29/30;H01L21/304;(IPC1-7):H01L21/304	主分类号	C30B29/30
代理机构		代理人
主权项
地址

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