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发明名称
MECHANICAL HOLDER FOR PROBE DEVICE
摘要
申请公布号
JPH05267406(A)
申请公布日期
1993.10.15
申请号
JP19930031408
申请日期
1993.01.27
申请人
发明人
分类号
G01R1/073;G01R1/067;G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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