Reactive gas mixt. compsn. determn. and control for thermochemical treatment - by spectrometrically analysing luminous radiation emitted by plasma generation of ionic bombardment, and measuring spectral ray characteristic intensity

摘要

The determin. comprises the spectrometric analysis of the luminous radiation emitted by the plasma generated by an ionic bombardment effected in the presence of the reactive gas mixt.. The intensity of the spectral rays characteristic of the gas mixt. is measured and the content of the element(s) is determined from the values of the intensities previously measured. The value determined may be compared with a consigned value and the compsn. of the gas mixt. may be modified as a function of the results of the comparison. The device is also new and comprises an airtight enclousre (1) in which a vacuum may be introduced; a support (3) for the components (12) to be treated; a heating system; and treatment gas injector (6-10) into the furnace. The enclosure (1) has a window through which the spectrometric analysis may be performed. USE/ADVANTAGE - The determn. is used to determine and control the compsn. of a reactive gas mixt. used for thermochemical treatment under a rarefied atmos. e.g. metallurgical cementation opt. assited by ionic bombardment. The determn. esp. allows real-time control of the gas compsn. reducing the risk of deterioration of the components, which may be expensive, during treatment.