PLASMA DAMAGE REDUCTION AND PLASMA PROCESSOR,申请号JP19920094953-传众专利搜索

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发明名称	PLASMA DAMAGE REDUCTION AND PLASMA PROCESSOR
摘要
申请公布号	JPH05267237(A)	申请公布日期	1993.10.15
申请号	JP19920094953	申请日期	1992.03.23
申请人		发明人
分类号	H05H1/46;C23C14/35;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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