| 摘要 |
PURPOSE:To provide a planar optical waveguide in which the distance between quartz waveguides do not change in the production process and the position of quartz waveguide can be accurately recognized. CONSTITUTION:This waveguide consists of a substrate, lower clad layer formed on the substrate, core layer formed by patterning on the lower clad layer, and upper clad layer formed on the core layer. The material to constitute the upper clad layer is softer than the clad-core material constituting the lower clad layer and core layer. Further, the upper clad layer is formed at rather low temp. |
