QUARTZ TUBE INSTALLATION AND ITS STRUCTURE,申请号JP19920063925-传众专利搜索

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发明名称	QUARTZ TUBE INSTALLATION AND ITS STRUCTURE
摘要
申请公布号	JPH05267199(A)	申请公布日期	1993.10.15
申请号	JP19920063925	申请日期	1992.03.19
申请人		发明人
分类号	H01L21/22;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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