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发明名称
MICROWAVE PLASMA GENERATING DEVICE
摘要
申请公布号
JPH05266993(A)
申请公布日期
1993.10.15
申请号
JP19920065005
申请日期
1992.03.23
申请人
发明人
分类号
G01R33/64;C23C16/50;C23F4/00;G01N24/14;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46
主分类号
G01R33/64
代理机构
代理人
主权项
地址
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