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发明名称
SELECTIVE GROWTH METHOD FOR SILICON EPITAXIAL FILM AND GROWTH DEVICE
摘要
申请公布号
JPH05267166(A)
申请公布日期
1993.10.15
申请号
JP19920046456
申请日期
1992.03.04
申请人
发明人
分类号
C30B23/08;C30B29/06;H01L21/203;H01L21/205;(IPC1-7):H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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