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发明名称
SEMICONDUCTOR-WAFER CLEANING APPARATUS
摘要
申请公布号
JPH05267261(A)
申请公布日期
1993.10.15
申请号
JP19920063026
申请日期
1992.03.19
申请人
发明人
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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