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发明名称
FORMING METHOD OF SEMICONDUCTOR THIN FILM
摘要
申请公布号
KR930010093(B1)
申请公布日期
1993.10.14
申请号
KR19850008266
申请日期
1985.11.06
申请人
SONY CORP.
发明人
NOGUCHI, TAKEFUMI;OSHIMA, TAKEFUMI;HAYASHI, HISAO
分类号
C23C16/24;C23C16/48;H01L21/20;H01L21/205;H01L21/324;H01L21/336;H01L29/786;(IPC1-7):H01L27/01;H01L29/02
主分类号
C23C16/24
代理机构
代理人
主权项
地址
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