VERFAHREN UND APPARAT ZUM PACKEN INTEGRIERTER SCHALTUNGSCHIPS MIT EINER POLYMERFILM-BEDECKUNGSSCHICHT.

摘要

A method and apparatus for disposing a polymer film (35) on an irregularly-shaped substrate at relatively high temperatures. In particular, the method and apparatus of the present invention provide a system for the packaging of very large scale integrated circuit chips (33). The system of the present invention particularly solves problems associated with high temperature processing and problems associated with the highly irregular surfaces that result. Nonetheless, the resultant product is capable of being fashioned into circuit chip systems which are independently testable and which may be reconfigured after testing by removal of the polymer film itself.