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发明名称
Direkt-Temperaturkontrolle eines Wafers.
摘要
申请公布号
DE3883809(D1)
申请公布日期
1993.10.14
申请号
DE19883883809
申请日期
1988.02.15
申请人
BALZERS AG, BALZERS, LI
发明人
PRICE, J.B., SCOTTSDALE ARIZONA 85251, US;ROSLER, RICHARD S., PARADISE VALLEY ARIZONA 85253, US
分类号
H01L21/66;G01K1/14;H01L21/205;H01L21/31;(IPC1-7):G01K1/14
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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