Vacuum vapour deposition equipment for coating substrates - with several magnetron cathode sets, each comprising a magnet pair, a screened target and aperture for a substrate

摘要

Vacuum vapour deposition equipment for coating substrates, using a cathode target (5) with electrical connection (7) mounted on a cooling plate (1) with electrical insulator (6) between target and cooling plate, a magnet set (9, 9') and target surrounding screening (2) with an aperture opening. Several targets (5) are mounted in one plane on the side of the cooling plate (1) facing the substrates, each target having an individual electrical connection and a substrate assigned to it. USE/ADVANTAGE - The equipment is used for vapour deposition coating of data storage devices, esp. magnetic discs, with a throughput substantially better than obtainable with single disc plants.