| 摘要 |
PURPOSE:To eliminate the influence of a contact resistance between a probe means and an electrode to be measured and precisely measure its voltage without connecting a current source and a voltage measuring means to a common grounding conductor in a semiconductor device and its test device. CONSTITUTION:A semiconductor device has a power source terminal 13 for supplying a power to an internal circuit 12 for processing signals and an earthing terminal 14, and a testing earthing terminal 15 for helping the test of the semiconductor device is provided separately from the earthing terminal 14. A test device has a prove means 16 which is brought into contact with each terminal 11, 13, 14 of a test target 20, a current source 17 for measuring the output voltage of the test target 20 through the probe means 16, and a voltage detecting means 18. A first grounding conductor L1 related to the current source 17 and a second grounding conductor L2 related to the voltage detecting means 18 are separately provided, and a testing switching means 19 is provided between the first and second grounding conductors L1, L2. |
