| 摘要 |
PURPOSE:To reduce evaporation of a target substance, suppress deposition to an optical system and other equipment, and obtain a target which can cope with a highly repetitive operation by providing a thin film which becomes a target substance on a support. CONSTITUTION:A target substance 1 such as molybdenum and gold which is thinned with a thickness of 0.1-0.9mum is deposited on a band-shaped and flexible support 2 which is made by polymer etc. The support can combust and vaporize the evaporated support 2 by introducing a slight oxygen into a vacuum chamber. Also, by achieving a mechanical strength, the target substance 1 can be thinned to a thickness so that no deposition is generated. A target 20 is wound around a feed-side reel 21. Then, the target 20 is wound up by a reception-side reel 22 and then moves on a laser-irradiation surface 24. Also, since the target 20 is brought onto the irradiation surface 24 constantly, a guide 23 is provided, thus supplying a new target substance onto the irradiation surface 24 constantly even if laser is operated highly repeatedly. |
