| 摘要 |
PURPOSE:To produce pure water without increasing fine particles and impurity ions and to remove dissolved oxygen in pure water up to an extremely low concn. CONSTITUTION:A cation exchange resin tower 2, a decarbonating tower 3 and an anion exchange resin tower 6 are provided and an inert gas supply device 5 is connected to the bottom part of the decarbonating tower 3 to aerate water with inert gas or a dissolved oxygen removing tower 8 is connected to the rear stage of the anion exchange resin tower 6 and the inert gas supply device 5 is connected to the bottom part of the tower 8 and the gas discharged from the upper part of the dissolved oxygen removing tower 8 is supplied to the bottom part of the decarbonating tower 3 through inert gas piping 10. |
