PRODUCTION OF DIELECTRIC THIN FILM AND ITS DEVICE,申请号JP19920063119-传众专利搜索

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发明名称	PRODUCTION OF DIELECTRIC THIN FILM AND ITS DEVICE
摘要
申请公布号	JPH05263240(A)	申请公布日期	1993.10.12
申请号	JP19920063119	申请日期	1992.03.19
申请人		发明人
分类号	C04B41/88;C23C14/08;C23C14/46;H01L21/822;H01L27/04;(IPC1-7):C23C14/46	主分类号	C04B41/88
代理机构		代理人
主权项
地址

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