发明名称 |
Electrical contacts for an electro-optic modulator |
摘要 |
A contact structure and method of formation of a contact structure for an electro-optic modulator. Linear electrodes on a modulator crystal are covered with a dielectric layer. The electrodes are contacted by way of one or more vias through the dielectric layer. Contact pads are formed over the vias so as to contact the electrode and extend over several adjacent electrodes, providing significantly greater contact area for a driver chip applied to the modulator crystal.
|
申请公布号 |
US5252180(A) |
申请公布日期 |
1993.10.12 |
申请号 |
US19920889863 |
申请日期 |
1992.05.28 |
申请人 |
XEROX CORPORATION |
发明人 |
SANG, JR., HENRY W.;BERNSTEIN, MARK S.;BERKOVITZ, MICHAEL A. |
分类号 |
G02F1/03;G02F1/055;(IPC1-7):C23F1/00 |
主分类号 |
G02F1/03 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|