THIN FILM FORMING DEVICE,申请号JP19920087559-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH05259094(A)	申请公布日期	1993.10.08
申请号	JP19920087559	申请日期	1992.03.12
申请人		发明人
分类号	C23C16/50;C23C16/27;C23C16/511;H01L21/205;H01L21/31;(IPC1-7):H01L21/205	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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