| 摘要 |
PURPOSE:To obtain the waveguide device which enables optical axis alignment with good workability and high accuracy. CONSTITUTION:The end faces of the waveguide parts 4a formed on an Si substrate are exposed on the end face of the waveguide device 10. A pair of V- grooves 2A are formed as the prescribed regions previously subjected to a surface treatment to prevent the deposition of glass particulate layers thereon, and therefore the accuracy of the V-grooves 2a is maintained. A holder 20 is formed by working the Si substrate and optical fibers 22 are fixed on its surface at the same interval as the interval of the waveguide parts 4a. A pair of V-grooves 26 are also formed on the holder 20 side. A pair of guide pins are passed from the V grooves 2a of the waveguide device 10 to the V-grooves 26 of the holder 20. The optical axis alignment of the high accuracy is enabled in the coupling of the end face of the waveguide part 4a of the waveguide device 10 and the end faces of the fibers of the holder 20 when the waveguide device 10 and the holder 20 are mechanically pressed to these guide pins. |
